Inventor
NICKSIC CABE W
US4 patents
Patents
4 patentsUS7620470B1Nov 17, 2009
Method and apparatus for impasse detection and resolution
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US6790686B1Sep 14, 2004
Method and apparatus for integrating dispatch and process control actions
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US7296103B1Nov 13, 2007
Method and system for dynamically selecting wafer lots for metrology processing
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US7299106B1Nov 20, 2007
Method and apparatus for scheduling metrology based on a jeopardy count
ADVANCED MICRO DEVICES INC2 citations60