Inventor
HARA TOMOHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “HARA TOMOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
5 patentsUS12573598B2Mar 10, 2026
Wafer placement table
NGK INSULATORS LTD0 citations60
US12452963B2Oct 21, 2025
Ceramic heater
NGK INSULATORS LTD0 citations49
US12398465B2Aug 26, 2025
Ceramic heater
NGK INSULATORS LTD0 citations49
US12170190B2Dec 17, 2024
Wafer support table and RF rod
NGK INSULATORS LTD0 citations49
US12598950B2Apr 7, 2026
Electrostatic chuck heater and film deposition apparatus
NGK INSULATORS LTD0 citations47