Inventor
HIKIMA IKUO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “HIKIMA IKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS4820899AApr 11, 1989
Laser beam working system
NIKON CORP51 citations92
US7924416B2Apr 12, 2011
Measurement apparatus, exposure apparatus, and device manufacturing method
NIKON CORP7 citations82
US4952945AAug 28, 1990
Exposure apparatus using excimer laser source
NIKON CORP16 citations71
US10025194B2Jul 17, 2018
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US9513558B2Dec 6, 2016
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US8749759B2Jun 10, 2014
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61