P

Inventor

BHAT SANJAY

IN34 patents
⚠️ This page may combine multiple inventors who share the name “BHAT SANJAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

26 patents
US7794544B2Sep 14, 2010

Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system

APPLIED MATERIALS INC49 citations95
US11422096B2Aug 23, 2022

Surface topography measurement apparatus and method

APPLIED MATERIALS INC6 citations85
US10685821B2Jun 16, 2020

Physical vapor deposition processing systems target cooling

APPLIED MATERIALS INC4 citations73
US11387085B2Jul 12, 2022

Multicathode deposition system

APPLIED MATERIALS INC2 citations67
US11940724B2Mar 26, 2024

Reticle processing system

APPLIED MATERIALS INC0 citations62
US11789358B2Oct 17, 2023

Extreme ultraviolet mask blank defect reduction

APPLIED MATERIALS INC0 citations62
US11668003B2Jun 6, 2023

Deposition system with a multi-cathode

APPLIED MATERIALS INC0 citations62
US11604151B2Mar 14, 2023

Surface topography measurement apparatus and method

APPLIED MATERIALS INC0 citations62
US11599016B2Mar 7, 2023

Physical vapor deposition system and processes

APPLIED MATERIALS INC0 citations62
US11557473B2Jan 17, 2023

System and method to control PVD deposition uniformity

APPLIED MATERIALS INC1 citations62
US11515132B2Nov 29, 2022

Physical vapor deposition processing systems target cooling

APPLIED MATERIALS INC0 citations62
US11236415B2Feb 1, 2022

Deposition system with shield mount

APPLIED MATERIALS INC0 citations62
US11237473B2Feb 1, 2022

Physical vapor deposition system and processes

APPLIED MATERIALS INC0 citations62
US11230761B2Jan 25, 2022

Deposition system with a multi-cathode

APPLIED MATERIALS INC0 citations62
US11037769B2Jun 15, 2021

Physical vapor deposition processing systems target cooling

APPLIED MATERIALS INC0 citations62
US10763091B2Sep 1, 2020

Physical vapor deposition chamber particle reduction apparatus and methods

APPLIED MATERIALS INC1 citations62
US11480865B2Oct 25, 2022

Method and apparatus to improve EUV mask blank flatness

APPLIED MATERIALS INC0 citations61
US11669008B2Jun 6, 2023

Extreme ultraviolet mask blank defect reduction methods

APPLIED MATERIALS INC0 citations60
US11480866B2Oct 25, 2022

Method and apparatus to anneal EUV mask blank

APPLIED MATERIALS INC0 citations60
US10504705B2Dec 10, 2019

Physical vapor deposition chamber with static magnet assembly and methods of sputtering

APPLIED MATERIALS INC1 citations56
US12051576B2Jul 30, 2024

Multicathode deposition system and methods

APPLIED MATERIALS INC0 citations52
US11639544B2May 2, 2023

Physical vapor deposition system and processes

APPLIED MATERIALS INC0 citations52
US11542595B2Jan 3, 2023

Physical vapor deposition system and processes

APPLIED MATERIALS INC0 citations52
US11390940B2Jul 19, 2022

System and method to control PVD deposition uniformity

APPLIED MATERIALS INC0 citations52
US11365475B2Jun 21, 2022

Physical vapor deposition chamber cleaning processes

APPLIED MATERIALS INC0 citations51
US11860528B2Jan 2, 2024

Multi-chamber substrate processing platform

APPLIED MATERIALS INC0 citations45

SIGNIFY HOLDING BV

5 patents

KONINKLIJKE PHILIPS NV

1 patent

TATA CONSULTANCY SERVICES LTD

1 patent

NARAYANAN VENKATASUBRAMANIAN

1 patent