Inventor
GHANTASALA SATHYENDRA
US6 patents
Patents
6 patentsUS9934351B2Apr 3, 2018
Wafer point by point analysis and data presentation
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US10607815B2Mar 31, 2020
Methods and apparatuses for plasma chamber matching and fault identification
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US10896833B2Jan 19, 2021
Methods and apparatus for detecting an endpoint of a seasoning process
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US11668553B2Jun 6, 2023
Apparatus and method for controlling edge ring variation
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US12435963B2Oct 7, 2025
Apparatus and method for controlling edge ring variation
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US11209478B2Dec 28, 2021
Pulse system verification
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