Inventor
KIM MIN HYOUNG
KR3 patents
Patents
3 patentsUS11107705B2Aug 31, 2021
Cleaning solution production systems and methods, and plasma reaction tanks
SAMSUNG ELECTRONICS CO LTD3 citations69
US11545372B2Jan 3, 2023
Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations67
US11664242B2May 30, 2023
Cleaning solution production systems and methods, and plasma reaction tanks
SAMSUNG ELECTRONICS CO LTD0 citations58