Inventor
JANG WON HYUK
KR8 patents
⚠️ This page may combine multiple inventors who share the name “JANG WON HYUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS11107705B2Aug 31, 2021
Cleaning solution production systems and methods, and plasma reaction tanks
SAMSUNG ELECTRONICS CO LTD3 citations69
US11545372B2Jan 3, 2023
Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations67
US11664242B2May 30, 2023
Cleaning solution production systems and methods, and plasma reaction tanks
SAMSUNG ELECTRONICS CO LTD0 citations58
US9564298B2Feb 7, 2017
Semiconductor manufacturing apparatus and semiconductor device manufacturing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations50