Inventor
WONG CARLATON
US10 patents
Patents
10 patentsUS12020977B2Jun 25, 2024
Lift pin assembly
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Radio frequency conduit
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Substrate processing chamber
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Semiconductor processing chambers and methods for deposition and etch
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Thread profiles for semiconductor process chamber components
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Methods and apparatus for conductance liners in semiconductor process chambers
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Lift pin mechanism
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Showerhead assembly with recursive gas channels
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US12278089B2Apr 15, 2025
Plasma uniformity control system and methods
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