Inventor

SIGEL BENJAMIN

DE4 patents

⚠️ This page may combine multiple inventors who share the name “SIGEL BENJAMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US9851555B2Dec 26, 2017

Optical component

ZEISS CARL SMT GMBH3 citations68

US12585194B2Mar 24, 2026

Method and swapping tool

ZEISS CARL SMT GMBH0 citations46

SIGEL BENJAMIN

2 patents

US9030644B2May 12, 2015

Projection exposure apparatus for semiconductor lithography including an actuator system

SIGEL BENJAMIN1 citations39

US9964673B2May 8, 2018

Optical system with aperture device having plurality of aperture elements

SIGEL BENJAMIN0 citations33