Inventor
WIECZOREK CLAUDIA
DE2 patents
Patents
2 patentsUS4608271AAug 26, 1986
Method for the manufacture of metal silicide layers by means of reduced pressure gas phase deposition
SIEMENS AG36 citations89
US4501769AFeb 26, 1985
Method for selective deposition of layer structures consisting of silicides of HMP metals on silicon substrates and products so-formed
SIEMENS AG26 citations78