Inventor
NAKANO AKIYOSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO AKIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
5 patentsUS10720333B2Jul 21, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US10410887B2Sep 10, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US10424496B2Sep 24, 2019
Substrate treating method
SCREEN HOLDINGS CO LTD4 citations71
US11342190B2May 24, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US10199231B2Feb 5, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
DAINIPPON SCREEN MFG
4 patentsUS9343287B2May 17, 2016
Substrate processing apparatus including spin chuck
DAINIPPON SCREEN MFG3 citations69
US8020240B2Sep 20, 2011
Substrate treatment apparatus
DAINIPPON SCREEN MFG2 citations62
US7979942B2Jul 19, 2011
Substrate treatment apparatus and substrate treatment method
DAINIPPON SCREEN MFG5 citations61
US8051522B2Nov 8, 2011
Substrate treatment apparatus
DAINIPPON SCREEN MFG2 citations58