Inventor
PETRO WILLIAM G
US4 patents
⚠️ This page may combine multiple inventors who share the name “PETRO WILLIAM G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
3 patentsUS5326723AJul 5, 1994
Method for improving stability of tungsten chemical vapor deposition
INTEL CORP146 citations97
US5260236ANov 9, 1993
UV transparent oxynitride deposition in single wafer PECVD system
INTEL CORP63 citations94
US6645353B2Nov 11, 2003
Approach to optimizing an ILD argon sputter process
INTEL CORP6 citations55