Inventor

KOHNO YASUTAKA

JP19 patents

⚠️ This page may combine multiple inventors who share the name “KOHNO YASUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOHNO YASUTAKA

MITSUBISHI ELECTRIC CORP

Semiconductor device with reduced stress on gate electrode

Method for producing refractory metal gate electrode

Field effect transistor and method for producing the field effect transistor

Method of manufacturing a field effect transistor with a T-shaped gate electrode and reduced capacitance

Light ozone asher, light ashing method, and manufacturing method of semiconductor device

Semiconductor device electrode

Method of fabricating semiconductor device

Method of producing a semiconductor device using electron cyclotron resonance plasma CVD and substrate biasing

Method of fabricating a self aligned semiconductor device

Field-effect semiconductor device

Method of making field effect transistor

Recessed gate field effect transistor

Compound semiconductor device with a particular gate structure

Method for producing a semiconductor device

Semiconductor device and method for manufacture thereof

Method of making asymmetrical gate field effect transistor

Method for producing semiconductor device

Production method of a semiconductor device

MITSUBISHI DENKI KAUSHIKI KAIS

Semiconductor device with reduced stress applied to gate electrode