Inventor
SHIRAISHI HITOSHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAISHI HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
5 patentsUS7303945B2Dec 4, 2007
Method for forming pattern of stacked film and thin film transistor
NEC CORP10 citations83
US7317227B2Jan 8, 2008
Method for forming pattern of stacked film
NEC CORP6 citations73
US7781837B2Aug 24, 2010
Stacked film including a semiconductor film having a taper angle, and thin film transistor including the stacked film
NEC CORP2 citations62
US6933241B2Aug 23, 2005
Method for forming pattern of stacked film
NEC CORP2 citations62
US7618898B2Nov 17, 2009
Method and apparatus for forming contact hole
NEC CORP0 citations50