Inventor

TROJAN DANIEL

US2 patents

Patents

2 patents

US6923711B2Aug 2, 2005

Multizone carrier with process monitoring system for chemical-mechanical planarization tool

SPEEDFAM IPEC CORP25 citations89

US6368183B1Apr 9, 2002

Wafer cleaning apparatus and associated wafer processing methods

SPEEDFAM IPEC CORP39 citations89