Inventor
LI STEVEN T
US4 patents
Patents
4 patentsUS6500266B1Dec 31, 2002
Heater temperature uniformity qualification tool
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US6276295B1Aug 21, 2001
Thermal reflow method employing microwave energy
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US6143084ANov 7, 2000
Apparatus and method for generating plasma
APPLIED MATERIALS INC14 citations71
US6116186ASep 12, 2000
Apparatus for cooling a plasma generator
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