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Inventor
SHERRILL ROBERT W
US
2 patents
Patents
2 patents
US7226512B2
Jun 5, 2007
Load lock system for supercritical fluid cleaning
EKC TECHNOLOGY INC
11 citations
79
US6857437B2
Feb 22, 2005
Automated dense phase fluid cleaning system
EKC TECHNOLOGY INC
8 citations
69