Inventor
MESUDA KEI
JP3 patents
Patents
3 patentsUS7067221B2Jun 27, 2006
Designing method and device for phase shift mask
DAINIPPON PRINTING CO LTD12 citations80
US7367010B2Apr 29, 2008
Designing method and device for phase shift mask
DAINIPPON PRINTING CO LTD2 citations59
US7287240B2Oct 23, 2007
Designing method and device for phase shift mask
DAINIPPON PRINTING CO LTD6 citations59