P

Inventor

HARNISCH WOLFGANG

DE9 patents
⚠️ This page may combine multiple inventors who share the name “HARNISCH WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMS GMBH

3 patents
US7286284B2Oct 23, 2007

Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection

ZEISS CARL SMS GMBH13 citations82
US7916930B2Mar 29, 2011

Method and arrangement for repairing photolithography masks

ZEISS CARL SMS GMBH5 citations60
US7525115B2Apr 28, 2009

Arrangement for inspecting objects, especially masks in microlithography

ZEISS CARL SMS GMBH3 citations55

ZEISS CARL SMT AG

1 patent
US7623620B2Nov 24, 2009

Reflective X-ray microscope and inspection system for examining objects with wavelengths <100 nm

ZEISS CARL SMT AG26 citations91

CARL ZEISS MICROELECTRIC SYSTE

1 patent
US6925225B2Aug 2, 2005

Device for flat illumination of an object field

CARL ZEISS MICROELECTRIC SYSTE24 citations87

ZEISS CARL JENA GMBH

1 patent
US7167310B2Jan 23, 2007

Microscope, especially microscope used for inspection in semiconductor manufacture

ZEISS CARL JENA GMBH2 citations56

BOEHM KLAUS

1 patent
US8705838B2Apr 22, 2014

Method for mask inspection for mask design and mask production

BOEHM KLAUS3 citations50

TOTZECK MICHAEL

1 patent
USRE44216EMay 14, 2013

Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection

TOTZECK MICHAEL0 citations50

ARNZ MICHAEL

1 patent
US8731273B2May 20, 2014

Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section

ARNZ MICHAEL0 citations40