Inventor

SHIU LIN-HUNG

TW3 patents

⚠️ This page may combine multiple inventors who share the name “SHIU LIN-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US7675604B2Mar 9, 2010

Hood for immersion lithography

TAIWAN SEMICONDUCTOR MFG0 citations40

US7666576B2Feb 23, 2010

Exposure scan and step direction optimization

TAIWAN SEMICONDUCTOR MFG0 citations39

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US10101659B2Oct 16, 2018

Lithography method with surface modification layer

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations48