P

Inventor

RONNE ALLAN K

US7 patents
⚠️ This page may combine multiple inventors who share the name “RONNE ALLAN K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents
US7854820B2Dec 21, 2010

Upper electrode backing member with particle reducing features

LAM RES CORP38 citations91
US7685965B1Mar 30, 2010

Apparatus for shielding process chamber port

LAM RES CORP17 citations82
US10037869B2Jul 31, 2018

Plasma processing devices having multi-port valve assemblies

LAM RES CORP2 citations71
US12100575B2Sep 24, 2024

Plasma processing devices having multi-port valve assemblies

LAM RES CORP0 citations60
US9093483B2Jul 28, 2015

Showerhead electrode assembly with gas flow modification for extended electrode life

LAM RES CORP0 citations51

AUGUSTINO JASON

1 patent
US8702866B2Apr 22, 2014

Showerhead electrode assembly with gas flow modification for extended electrode life

AUGUSTINO JASON10 citations82

DE LA LLERA ANTHONY

1 patent
US8709202B2Apr 29, 2014

Upper electrode backing member with particle reducing features

DE LA LLERA ANTHONY2 citations61