Inventor
SAIGA YASUHITO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SAIGA YASUHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7901149B2Mar 8, 2011
Substrate processing method, program, computer-readable recording medium, and substrate processing system
TOKYO ELECTRON LTD2 citations61
US8007968B2Aug 30, 2011
Substrate processing method, program, computer-readable storage medium and substrate processing system
TOKYO ELECTRON LTD5 citations60
US7651285B2Jan 26, 2010
Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage medium
TOKYO ELECTRON LTD1 citations51
US7826032B2Nov 2, 2010
Circulation system for high refractive index liquid in pattern forming apparatus
TOKYO ELECTRON LTD0 citations40