Inventor
SMIRNOV STANISLAV Y
US13 patents
⚠️ This page may combine multiple inventors who share the name “SMIRNOV STANISLAV Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
6 patentsUS7965378B2Jun 21, 2011
Optical system and method for illumination of reflective spatial light modulators in maskless lithography
ASML HOLDING NV8 citations75
US7633689B2Dec 15, 2009
Catadioptric optical system for scatterometry
ASML HOLDING NV11 citations75
US8982481B2Mar 17, 2015
Catadioptric objective for scatterometry
ASML HOLDING NV2 citations60
US7826142B2Nov 2, 2010
Method for improved optical design using deterministically defined surfaces
ASML HOLDING NV4 citations60
US10048591B2Aug 14, 2018
Catadioptric illumination system for metrology
ASML HOLDING NV0 citations51
US7839487B2Nov 23, 2010
Optical system for increasing illumination efficiency of a patterning device
ASML HOLDING NV0 citations50
SMIRNOV STANISLAV Y
5 patentsUS9285687B2Mar 15, 2016
Inspection apparatus, lithographic apparatus, and device manufacturing method
SMIRNOV STANISLAV Y2 citations60
US9069260B2Jun 30, 2015
Catadioptric illumination system for metrology
SMIRNOV STANISLAV Y0 citations49
US8634064B2Jan 21, 2014
Optical system for increasing illumination efficiency of a patterning device by producing a plurality of beams
SMIRNOV STANISLAV Y1 citations49
US8259398B2Sep 4, 2012
High numerical aperture catadioptric objectives without obscuration and applications thereof
SMIRNOV STANISLAV Y0 citations48
US8064148B2Nov 22, 2011
High numerical aperture catadioptric objectives without obscuration and applications thereof
SMIRNOV STANISLAV Y1 citations48