Inventor
VENKATARAMAN ARUN MAHADEVAN
US5 patents
⚠️ This page may combine multiple inventors who share the name “VENKATARAMAN ARUN MAHADEVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
3 patentsUS8982481B2Mar 17, 2015
Catadioptric objective for scatterometry
ASML HOLDING NV2 citations60
US12405227B2Sep 2, 2025
Method for region of interest processing for reticle particle detection
ASML HOLDING NV0 citations56
US8004770B2Aug 23, 2011
Pulse modifier with adjustable etendue
ASML HOLDING NV1 citations49