Inventor
SHOUDY MATTHEW T
US12 patents
⚠️ This page may combine multiple inventors who share the name “SHOUDY MATTHEW T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
11 patentsUS9312224B1Apr 12, 2016
Interconnect structure containing a porous low k interconnect dielectric/dielectric cap
IBM9 citations84
US9558934B2Jan 31, 2017
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication
IBM3 citations73
US10903111B2Jan 26, 2021
Semiconductor device with linerless contacts
IBM4 citations70
US12438039B2Oct 7, 2025
Air gap in beol interconnect
IBM0 citations62
US11688632B2Jun 27, 2023
Semiconductor device with linerless contacts
IBM0 citations60
US11164776B2Nov 2, 2021
Metallic interconnect structure
IBM0 citations60
US10923401B2Feb 16, 2021
Gate cut critical dimension shrink and active gate defect healing using selective deposition
IBM1 citations59
US9607825B2Mar 28, 2017
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication
IBM0 citations52
US9558935B2Jan 31, 2017
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication
IBM0 citations52
US9536733B2Jan 3, 2017
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication
IBM0 citations52
US9449812B2Sep 20, 2016
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication
IBM0 citations52