Inventor
MIYAGAWA DAIKI
JP5 patents
Patents
5 patentsUS9343344B2May 17, 2016
End effector device
KAWASAKI HEAVY IND LTD5 citations71
US10553471B2Feb 4, 2020
Substrate conveying system and method
KAWASAKI HEAVY IND LTD1 citations60
US10483143B2Nov 19, 2019
End effector and substrate conveying robot
KAWASAKI HEAVY IND LTD1 citations60
US10062594B2Aug 28, 2018
End effector device
KAWASAKI HEAVY IND LTD1 citations49
US10297482B2May 21, 2019
End effector and substrate conveying robot
KAWASAKI HEAVY IND LTD0 citations39