Inventor
NAGAHAMA HIROYUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAGAHAMA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
4 patentsUS9423356B2Aug 23, 2016
Illumination apparatus and inspection apparatus
NUFLARE TECHNOLOGY INC4 citations73
US8767200B2Jul 1, 2014
Luminous flux branching element and mask defect inspection apparatus
NUFLARE TECHNOLOGY INC2 citations62
US10655956B2May 19, 2020
Displacement measuring apparatus, electron beam inspection apparatus, and displacement measuring method
NUFLARE TECHNOLOGY INC0 citations41
US9213001B2Dec 15, 2015
Focal position adjustment method and inspection method
NUFLARE TECHNOLOGY INC0 citations41