Inventor

OGAWA AKIHIKO

JP10 patents

⚠️ This page may combine multiple inventors who share the name “OGAWA AKIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents

US11633828B2Apr 25, 2023

Substrate polishing system, substrate polishing method and substrate polishing apparatus

EBARA CORP0 citations49

US10890899B2Jan 12, 2021

Method of semiconductor manufacturing apparatus and non-transitory computer-readable storage medium storing a program of causing computer to execute design method of semiconductor manufacturing apparatus

EBARA CORP0 citations48

US10625390B2Apr 21, 2020

Polishing apparatus and polishing method

EBARA CORP0 citations41

FUJITSU LTD

2 patents

US6738763B1May 18, 2004

Information retrieval system having consistent search results across different operating systems and data base management systems

FUJITSU LTD8 citations70

US6469643B1Oct 22, 2002

Information processing system

FUJITSU LTD11 citations70

TAKAHASHI TARO

2 patents

US9068814B2Jun 30, 2015

Polishing monitoring method, polishing apparatus and monitoring apparatus

TAKAHASHI TARO3 citations61

US8454407B2Jun 4, 2013

Polishing method and apparatus

TAKAHASHI TARO2 citations58

MEIKI SEISAKUSHO KK

1 patent

US6041840AMar 28, 2000

Vacuum lamination device and a vacuum lamination method

MEIKI SEISAKUSHO KK48 citations90

KOBAYASHI YOICHI

1 patent

US8078419B2Dec 13, 2011

Polishing monitoring method and polishing apparatus

KOBAYASHI YOICHI8 citations83

TEIKOKU CHEM IND CO LTD

1 patent

US5143935ASep 1, 1992

Benzamide derivatives

TEIKOKU CHEM IND CO LTD10 citations67