Inventor
HEINBUCH SCOTT C
US6 patents
⚠️ This page may combine multiple inventors who share the name “HEINBUCH SCOTT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
5 patentsUS10876917B2Dec 29, 2020
Polymer composite vacuum components
MKS INSTR INC3 citations71
US10359332B2Jul 23, 2019
Polymer composite vacuum components
MKS INSTR INC3 citations71
US9588004B2Mar 7, 2017
Long lifetime cold cathode ionization vacuum gauge design
MKS INSTR INC5 citations71
US12123794B2Oct 22, 2024
Pirani gauge with model of power dissipation
MKS INSTR INC0 citations61
US11366036B2Jun 21, 2022
Polymer composite vacuum components
MKS INSTR INC0 citations60