Inventor

SHINADA MASATO

JP17 patents

⚠️ This page may combine multiple inventors who share the name “SHINADA MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINADA MASATO

TOKYO ELECTRON LTD

Film formation apparatus and film formation method

Substrate processing method and substrate processing apparatus

Placing table and substrate processing apparatus

Substrate processing apparatus

Film forming system and method for forming film on substrate

Sputtering apparatus and film forming method

Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method

Sputtering apparatus and method of controlling sputtering apparatus

Film formation device and film formation method

Substrate processing apparatus and cleaning method

Apparatus and method for performing sputtering process

Film-forming apparatus, film-forming system, and film-forming method

Cathode unit and film forming apparatus

Film forming apparatus and film forming method

Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus

Processing method and processing apparatus

CANON ANELVA CORP

Sputtering apparatus