Inventor

HOCKERSMITH DAN T

US3 patents

Patents

3 patents

US4661196AApr 28, 1987

Plasma etch movable substrate

TEXAS INSTRUMENTS INC32 citations84

US4657620AApr 14, 1987

Automated single slice powered load lock plasma reactor

TEXAS INSTRUMENTS INC24 citations79

US4657618AApr 14, 1987

Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate

TEXAS INSTRUMENTS INC19 citations70