Inventor
JONES JOHN I
US10 patents
Patents
10 patentsUS4886570ADec 12, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC160 citations99
US4842686AJun 27, 1989
Wafer processing apparatus and method
TEXAS INSTRUMENTS INC54 citations96
US4838990AJun 13, 1989
Method for plasma etching tungsten
TEXAS INSTRUMENTS INC102 citations96
US4822450AApr 18, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC56 citations96
US4836905AJun 6, 1989
Processing apparatus
TEXAS INSTRUMENTS INC117 citations94
US4695700ASep 22, 1987
Dual detector system for determining endpoint of plasma etch process
TEXAS INSTRUMENTS INC69 citations93
US4849067AJul 18, 1989
Method for etching tungsten
TEXAS INSTRUMENTS INC27 citations92
US4872938AOct 10, 1989
Processing apparatus
TEXAS INSTRUMENTS INC51 citations91
US4891087AJan 2, 1990
Isolation substrate ring for plasma reactor
TEXAS INSTRUMENTS INC39 citations89
US4657618AApr 14, 1987
Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate
TEXAS INSTRUMENTS INC19 citations70