Inventor
KEMBO YUKIO
JP36 patents
⚠️ This page may combine multiple inventors who share the name “KEMBO YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
29 patentsUS6411377B1Jun 25, 2002
Optical apparatus for defect and particle size inspection
HITACHI LTD174 citations99
US5463459AOct 31, 1995
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
HITACHI LTD145 citations99
US5274434ADec 28, 1993
Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line
HITACHI LTD218 citations99
US4391511AJul 5, 1983
Light exposure device and method
HITACHI LTD153 citations99
US5233191AAug 3, 1993
Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process
HITACHI LTD145 citations98
US4825453AApr 25, 1989
X-ray exposure apparatus
HITACHI LTD59 citations96
US4803712AFeb 7, 1989
X-ray exposure system
HITACHI LTD73 citations96
US4666291AMay 19, 1987
Light-exposure apparatus
HITACHI LTD57 citations96
US4475223AOct 2, 1984
Exposure process and system
HITACHI LTD141 citations96
US7940383B2May 10, 2011
Method of detecting defects on an object
HITACHI LTD42 citations95
US5136172AAug 4, 1992
Method and apparatus for detecting photoacoustic signal
HITACHI LTD61 citations95
US6850320B2Feb 1, 2005
Method for inspecting defects and an apparatus for the same
HITACHI LTD26 citations93
US5083869AJan 28, 1992
Photocoustic signal detecting device
HITACHI LTD41 citations93
US5062715ANov 5, 1991
Method and apparatus for detecting photoacoustic signal and method for detecting internal defect of semiconductor device
HITACHI LTD44 citations93
US7692779B2Apr 6, 2010
Apparatus and method for testing defects
HITACHI LTD12 citations92
US7639350B2Dec 29, 2009
Apparatus and method for testing defects
HITACHI LTD25 citations92
US7443496B2Oct 28, 2008
Apparatus and method for testing defects
HITACHI LTD16 citations92
US6650409B1Nov 18, 2003
Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system
HITACHI LTD39 citations92
US4852133AJul 25, 1989
X-ray lithography apparatus
HITACHI LTD38 citations92
US4777641AOct 11, 1988
Method and apparatus for alignment
HITACHI LTD27 citations92
US4447731AMay 8, 1984
Exterior view examination apparatus
HITACHI LTD45 citations92
US4213117AJul 15, 1980
Method and apparatus for detecting positions of chips on a semiconductor wafer
HITACHI LTD49 citations92
US8011230B2Sep 6, 2011
Scanning probe microscope
HITACHI LTD10 citations84
US7631548B2Dec 15, 2009
Scanning probe microscope
HITACHI LTD10 citations84
US7173693B2Feb 6, 2007
Method for inspecting defects and an apparatus of the same
HITACHI LTD11 citations84
US4788577ANov 29, 1988
Substrate surface deflecting device
HITACHI LTD22 citations82
US4491787AJan 1, 1985
Flatness measuring device
HITACHI LTD12 citations74
US4708484ANov 24, 1987
Projection alignment method and apparatus
HITACHI LTD8 citations71
US8342008B2Jan 1, 2013
Scanning probe microscope
HITACHI LTD3 citations62
HITACHI HIGH TECH CORP
2 patentsRENESAS TECH CORP
2 patentsUS7177020B2Feb 13, 2007
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
RENESAS TECH CORP15 citations92
US6894773B2May 17, 2005
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
RENESAS TECH CORP11 citations74