P

Inventor

KAWAI TOSHIHIRO

JP39 patents
⚠️ This page may combine multiple inventors who share the name “KAWAI TOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SINFONIA TECHNOLOGY CO LTD

22 patents
US10672632B2Jun 2, 2020

Transfer chamber

SINFONIA TECHNOLOGY CO LTD11 citations84
US10658217B2May 19, 2020

Transfer chamber

SINFONIA TECHNOLOGY CO LTD10 citations82
US9704727B2Jul 11, 2017

Efem

SINFONIA TECHNOLOGY CO LTD10 citations82
US12201995B2Jan 21, 2025

Equipment front end module

SINFONIA TECHNOLOGY CO LTD2 citations72
US11495481B2Nov 8, 2022

Efem

SINFONIA TECHNOLOGY CO LTD1 citations71
US10923372B2Feb 16, 2021

Gas injection device

SINFONIA TECHNOLOGY CO LTD3 citations71
US10586723B2Mar 10, 2020

Door opening/closing system, and load port equipped with door opening/closing system

SINFONIA TECHNOLOGY CO LTD3 citations71
US11823934B2Nov 21, 2023

Wafer stocker

SINFONIA TECHNOLOGY CO LTD0 citations62
US11610797B2Mar 21, 2023

Wafer stocker

SINFONIA TECHNOLOGY CO LTD0 citations62
US11823923B2Nov 21, 2023

Transfer chamber

SINFONIA TECHNOLOGY CO LTD0 citations61
US11424145B2Aug 23, 2022

Transfer chamber

SINFONIA TECHNOLOGY CO LTD0 citations61
US10930537B2Feb 23, 2021

Door opening/closing system, and load port equipped with door opening/closing system

SINFONIA TECHNOLOGY CO LTD0 citations61
US12362207B2Jul 15, 2025

Efem

SINFONIA TECHNOLOGY CO LTD0 citations60
US12055220B2Aug 6, 2024

Sealing equipment

SINFONIA TECHNOLOGY CO LTD0 citations60
US12002693B2Jun 4, 2024

Efem

SINFONIA TECHNOLOGY CO LTD0 citations60
US11322378B2May 3, 2022

Equipment front end module

SINFONIA TECHNOLOGY CO LTD0 citations60
US12568789B2Mar 3, 2026

Equipment front end module

SINFONIA TECHNOLOGY CO LTD0 citations50
US12087606B2Sep 10, 2024

EFEM and method of controlling supply amount of inert gas

SINFONIA TECHNOLOGY CO LTD0 citations50
US12027398B2Jul 2, 2024

Efem

SINFONIA TECHNOLOGY CO LTD0 citations50
US11851289B2Dec 26, 2023

Conveyance system for transferring frame wafer

SINFONIA TECHNOLOGY CO LTD0 citations50
US11710652B2Jul 25, 2023

Transport system

SINFONIA TECHNOLOGY CO LTD0 citations50
US10636680B2Apr 28, 2020

Robot transport device

SINFONIA TECHNOLOGY CO LTD0 citations48

TOYODA AUTOMATIC LOOM WORKS

8 patents

TOYOTA MOTOR CO LTD

4 patents

AISIN SEIKI

1 patent

KAWAZU TAKANORI

1 patent

TOYODA JIDOSHOKKU SEISAKUSHO K

1 patent

NACHI FUJIKOSHI CORP

1 patent

KONDO YUMI

1 patent