Inventor
TERASAWA YUJIN
JP8 patents
Patents
8 patentsUS10608010B2Mar 31, 2020
Three-dimensional memory device containing replacement contact via structures and method of making the same
SANDISK TECHNOLOGIES LLC28 citations91
US11532570B2Dec 20, 2022
Three-dimensional memory device containing bridges for enhanced structural support and methods of forming the same
SANDISK TECHNOLOGIES LLC3 citations72
US10916504B2Feb 9, 2021
Three-dimensional memory device including electrically conductive layers with molybdenum-containing liners
SANDISK TECHNOLOGIES LLC5 citations72
US11778818B2Oct 3, 2023
Three-dimensional memory device with punch-through-resistant word lines and methods for forming the same
SANDISK TECHNOLOGIES LLC3 citations71
US12176203B2Dec 24, 2024
Methods and apparatuses for forming semiconductor devices containing tungsten layers using a tungsten growth suppressant
SANDISK TECHNOLOGIES LLC1 citations62
US12414296B2Sep 9, 2025
Three dimensional memory device and method of making thereof by forming channel and memory film after word line replacement
SANDISK TECHNOLOGIES LLC0 citations61
US12217965B2Feb 4, 2025
Methods and apparatuses for forming semiconductor devices containing tungsten layers using a tungsten growth suppressant
SANDISK TECHNOLOGIES LLC0 citations52
US12185540B2Dec 31, 2024
Three dimensional memory device and method of making thereof by forming channel and memory film after word line replacement
SANDISK TECHNOLOGIES LLC0 citations51