Inventor
MUKAIGAWA TOMONORI
JP4 patents
Patents
4 patentsUS6635495B2Oct 21, 2003
Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD16 citations91
US6262418B1Jul 17, 2001
Thermal type infrared sensing device, fabrication method for thermal type infrared sensing device, and infrared imaging system and infrared imaging apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations72
US6674081B2Jan 6, 2004
Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations61
US6576566B2Jun 10, 2003
Apparatus and method for forming thin film at low temperature and high deposition rate
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations61