Inventor
CYBULSKI RAYMOND F
US9 patents
Patents
9 patentsUS6795474B2Sep 21, 2004
Gas discharge laser with improved beam path
CYMER INC46 citations92
US6778584B1Aug 17, 2004
High power gas discharge laser with helium purged line narrowing unit
CYMER INC17 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US6496528B2Dec 17, 2002
Line narrowing unit with flexural grating mount
CYMER INC31 citations88
US7277466B2Oct 2, 2007
High power gas discharge laser with helium purged line narrowing unit
CYMER INC7 citations74
US6396582B1May 28, 2002
Wavelength reference for laser
CYMER INC10 citations73
US7346093B2Mar 18, 2008
DUV light source optical element improvements
CYMER INC8 citations71
US8379687B2Feb 19, 2013
Gas discharge laser line narrowing module
CYMER INC4 citations61
US6735236B2May 11, 2004
High power gas discharge laser with line narrowing unit
CYMER INC5 citations60