Inventor

YU YUAN-CHENG

TW2 patents

Patents

2 patents

US6004829ADec 21, 1999

Method of increasing end point detection capability of reactive ion etching by adding pad area

TAIWAN SEMICONDUCTOR MFG21 citations90

US6791666B2Sep 14, 2004

Variable transmission focal mask for lens heating compensation

TAIWAN SEMICONDUCTOR MFG6 citations58