Inventor
SYVERSON WILLIAM A
US13 patents
Patents
13 patentsUS6276370B1Aug 21, 2001
Sonic cleaning with an interference signal
IBM90 citations97
US5427622AJun 27, 1995
Method for uniform cleaning of wafers using megasonic energy
IBM64 citations96
US5294570AMar 15, 1994
Reduction of foreign particulate matter on semiconductor wafers
IBM66 citations94
US5579792ADec 3, 1996
Apparatus for uniform cleaning of wafers using megasonic energy
IBM32 citations92
US5533540AJul 9, 1996
Apparatus for uniform cleaning of wafers using megasonic energy
IBM37 citations92
US6000418ADec 14, 1999
Integrated dynamic fluid mixing apparatus and method
IBM21 citations89
US6776171B2Aug 17, 2004
Cleaning of semiconductor wafers by contaminate encapsulation
IBM43 citations88
US6875286B2Apr 5, 2005
Solid CO2 cleaning
IBM15 citations82
US6356653B2Mar 12, 2002
Method and apparatus for combined particle location and removal
IBM16 citations80
US7081208B2Jul 25, 2006
Method to build a microfilter
IBM9 citations74
US6565666B1May 20, 2003
Capillary dry process and apparatus
IBM6 citations60
US6939408B1Sep 6, 2005
Method for surface preparation of workpieces utilizing fluid separation techniques
IBM3 citations55
US7531059B2May 12, 2009
Cleaning of semiconductor wafers by contaminate encapsulation
IBM0 citations48