Inventor
COURAGE DAVID S
US3 patents
Patents
3 patentsUS6946326B2Sep 20, 2005
Method and device for protecting micro electromechanical systems structures during dicing of a wafer
ANALOG DEVICES INC15 citations91
US7022546B2Apr 4, 2006
Method and device for protecting micro electromechanical systems structures during dicing of a wafer
ANALOG DEVICES INC21 citations87
US6946366B2Sep 20, 2005
Method and device for protecting micro electromechanical systems structures during dicing of a wafer
ANALOG DEVICES INC8 citations68