Inventor

LE ROY ERWAN

US8 patents

⚠️ This page may combine multiple inventors who share the name “LE ROY ERWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CREDENCE SYSTEMS CORP

5 patents

US7135123B1Nov 14, 2006

Method and system for integrated circuit backside navigation

CREDENCE SYSTEMS CORP30 citations88

US6955930B2Oct 18, 2005

Method for determining thickness of a semiconductor substrate at the floor of a trench

CREDENCE SYSTEMS CORP14 citations82

US7115426B2Oct 3, 2006

Method and apparatus for addressing thickness variations of a trench floor formed in a semiconductor substrate

CREDENCE SYSTEMS CORP9 citations72

US7488937B2Feb 10, 2009

Method and apparatus for the improvement of material/voltage contrast

CREDENCE SYSTEMS CORP3 citations61

US7036109B1Apr 25, 2006

Imaging integrated circuits with focused ion beam

CREDENCE SYSTEMS CORP2 citations60

DCG SYSTEMS INC

2 patents

US7884024B2Feb 8, 2011

Apparatus and method for optical interference fringe based integrated circuit processing

DCG SYSTEMS INC4 citations58

US7697146B2Apr 13, 2010

Apparatus and method for optical interference fringe based integrated circuit processing

DCG SYSTEMS INC0 citations51

NPTEST LLC

1 patent

US6855622B2Feb 15, 2005

Method and apparatus for forming a cavity in a semiconductor substrate using a charged particle beam

NPTEST LLC10 citations72