Inventor
TSAO CHUN-CHENG
US12 patents
⚠️ This page may combine multiple inventors who share the name “TSAO CHUN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CREDENCE SYSTEMS CORP
4 patentsUS6955930B2Oct 18, 2005
Method for determining thickness of a semiconductor substrate at the floor of a trench
CREDENCE SYSTEMS CORP14 citations82
US7036109B1Apr 25, 2006
Imaging integrated circuits with focused ion beam
CREDENCE SYSTEMS CORP2 citations60
US6939209B2Sep 6, 2005
Method and apparatus for global die thinning and polishing of flip-chip packaged integrated circuits
CREDENCE SYSTEMS CORP2 citations59
US7245133B2Jul 17, 2007
Integration of photon emission microscope and focused ion beam
CREDENCE SYSTEMS CORP5 citations54
DCG SYSTEMS INC
4 patentsUS7612321B2Nov 3, 2009
Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner
DCG SYSTEMS INC7 citations72
US7439168B2Oct 21, 2008
Apparatus and method of forming silicide in a localized manner
DCG SYSTEMS INC7 citations64
US7884024B2Feb 8, 2011
Apparatus and method for optical interference fringe based integrated circuit processing
DCG SYSTEMS INC4 citations58
US7697146B2Apr 13, 2010
Apparatus and method for optical interference fringe based integrated circuit processing
DCG SYSTEMS INC0 citations51