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Inventor
SHIBATA AKIO
JP
9 patents
⚠️ This page may combine multiple inventors who share the name “SHIBATA AKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV TOHOKU
2 patents
US7078862B2
Jul 18, 2006
Beam source and beam processing apparatus
UNIV TOHOKU
13 citations
84
US7034285B2
Apr 25, 2006
Beam source and beam processing apparatus
UNIV TOHOKU
13 citations
84
EBARA CORP
2 patents
US5236562A
Aug 17, 1993
Method for discharging hydrogen from a vacuum vessel using a roughing vacuum pump and a turbo-molecular pump
EBARA CORP
16 citations
73
US6638788B2
Oct 28, 2003
Solar cell and method of manufacturing same
EBARA CORP
10 citations
71
TDK CORP
2 patents
US12400785B2
Aug 26, 2025
Multi-layer coil component
TDK CORP
0 citations
49
US12334247B2
Jun 17, 2025
Multi-layer coil component
TDK CORP
0 citations
49
EBARA SOLAR INC
1 patent
US5928438A
Jul 27, 1999
Structure and fabrication process for self-aligned locally deep-diffused emitter (SALDE) solar cell
EBARA SOLAR INC
223 citations
97
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
1 patent
US7103572B1
Sep 5, 2006
Electronic asset utilization system, electronic asset utilization method, server for use with electronic asset utilization system, and recording medium having recorded thereon electronic asset utilization method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
60 citations
95
MITSUBISHI HEAVY IND LTD
1 patent
US4113673A
Sep 12, 1978
Coating composition for leak detection in air test
MITSUBISHI HEAVY IND LTD
12 citations
65