Inventor
SMITH DANIEL ALEXANDER
US5 patents
Patents
5 patentsUS7615120B2Nov 10, 2009
Pulsed mass flow delivery system and method
MKS INSTR INC64 citations95
US7174263B2Feb 6, 2007
External volume insensitive flow verification
MKS INSTR INC35 citations91
US7121139B2Oct 17, 2006
Thermal mass flow rate sensor having fixed bypass ratio
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US7829353B2Nov 9, 2010
Pulsed mass flow delivery system and method
MKS INSTR INC18 citations90
US7628860B2Dec 8, 2009
Pulsed mass flow delivery system and method
MKS INSTR INC29 citations90