Inventor
CHAN-WONG LAI WA HELEN
CN3 patents
Patents
3 patentsUS7410039B2Aug 12, 2008
Tunable vibration absorption device
ASM ASSEMBLY AUTOMATION LTD13 citations80
US7227295B2Jun 5, 2007
Piezoelectric device with amplifying mechanism
ASM ASSEMBLY AUTOMATION LTD8 citations67
US7649333B2Jan 19, 2010
Active damping device for a positioning stage
ASM ASSEMBLY AUTOMATION LTD0 citations48