Inventor
NAKAMURA TSUNEHIKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA TSUNEHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KYOCERA CORP
7 patentsUS7417206B2Aug 26, 2008
Heater, wafer heating apparatus and method for manufacturing heater
KYOCERA CORP63 citations96
US7361865B2Apr 22, 2008
Heater for heating a wafer and method for fabricating the same
KYOCERA CORP160 citations95
US7457098B2Nov 25, 2008
Electrostatic chuck
KYOCERA CORP13 citations82
US7248456B2Jul 24, 2007
Electrostatic chuck
KYOCERA CORP7 citations72
US6914222B2Jul 5, 2005
Wafer heating apparatus
KYOCERA CORP11 citations72
US5648303AJul 15, 1997
Non-magnetic ceramics for recording/reproducing heads and method of producing the same
KYOCERA CORP7 citations72
US7646580B2Jan 12, 2010
Electrostatic chuck and wafer holding member and wafer treatment method
KYOCERA CORP6 citations60