Inventor
MADAN ANITA
US21 patents
⚠️ This page may combine multiple inventors who share the name “MADAN ANITA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
17 patentsUS7279758B1Oct 9, 2007
N-channel MOSFETs comprising dual stressors, and methods for forming the same
IBM24 citations91
US7462527B2Dec 9, 2008
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM14 citations89
US7407875B2Aug 5, 2008
Low resistance contact structure and fabrication thereof
IBM16 citations84
US7838428B2Nov 23, 2010
Method of repairing process induced dielectric damage by the use of GCIB surface treatment using gas clusters of organic molecular species
IBM16 citations83
US9870960B2Jan 16, 2018
Capacitance monitoring using X-ray diffraction
IBM2 citations72
US7769134B1Aug 3, 2010
Measuring strain of epitaxial films using micro x-ray diffraction for in-line metrology
IBM7 citations72
US7193500B2Mar 20, 2007
Thin film resistors of different materials
IBM4 citations63
US7485572B2Feb 3, 2009
Method for improved formation of cobalt silicide contacts in semiconductor devices
IBM3 citations62
US7473608B2Jan 6, 2009
N-channel MOSFETs comprising dual stressors, and methods for forming the same
IBM4 citations61
US10008421B2Jun 26, 2018
Capacitance monitoring using x-ray diffraction
IBM0 citations51
US8865571B2Oct 21, 2014
Dislocation engineering using a scanned laser
IBM0 citations50
US8865572B2Oct 21, 2014
Dislocation engineering using a scanned laser
IBM0 citations50
US7232774B2Jun 19, 2007
Polycrystalline silicon layer with nano-grain structure and method of manufacture
IBM0 citations50
US7804136B2Sep 28, 2010
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM0 citations49
US7622386B2Nov 24, 2009
Method for improved formation of nickel silicide contacts in semiconductor devices
IBM1 citations49
US7491660B2Feb 17, 2009
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM0 citations49
US9201027B2Dec 1, 2015
Evaluating semiconductor wafers for pitch walking and/or epitaxial merge
IBM1 citations45