Inventor
KOMIYA TAKAHARU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KOMIYA TAKAHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
3 patentsUS7382527B2Jun 3, 2008
EUV multilayer mirror with phase shifting layer
NIKON CORP17 citations91
US7706058B2Apr 27, 2010
Multilayer mirror, method for manufacturing the same, and exposure equipment
NIKON CORP4 citations61
US7440182B2Oct 21, 2008
Multilayer mirror, method for manufacturing the same, and exposure equipment
NIKON CORP1 citations61