Inventor
MAROKKEY SAJAN
US20 patents
⚠️ This page may combine multiple inventors who share the name “MAROKKEY SAJAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
12 patentsUS7687925B2Mar 30, 2010
Alignment marks for polarized light lithography and method for use thereof
INFINEON TECHNOLOGIES AG19 citations92
US7947431B2May 24, 2011
Lithography masks and methods of manufacture thereof
INFINEON TECHNOLOGIES AG7 citations83
US7820458B2Oct 26, 2010
Test structures and methods
INFINEON TECHNOLOGIES AG10 citations83
US7674703B1Mar 9, 2010
Gridded contacts in semiconductor devices
INFINEON TECHNOLOGIES AG9 citations82
US7556898B2Jul 7, 2009
Overlay target for polarized light lithography
INFINEON TECHNOLOGIES AG7 citations73
US8828748B2Sep 9, 2014
Test structures and methods
INFINEON TECHNOLOGIES AG1 citations62
US7807320B2Oct 5, 2010
Overlay target for polarized light lithography
INFINEON TECHNOLOGIES AG1 citations62
US7799486B2Sep 21, 2010
Lithography masks and methods of manufacture thereof
INFINEON TECHNOLOGIES AG2 citations62
US7666800B2Feb 23, 2010
Feature patterning methods
INFINEON TECHNOLOGIES AG2 citations62
US7583362B2Sep 1, 2009
Stray light feedback for dose control in semiconductor lithography systems
INFINEON TECHNOLOGIES AG2 citations62
US8377800B2Feb 19, 2013
Alignment marks for polarized light lithography and method for use thereof
INFINEON TECHNOLOGIES AG0 citations52
US7514356B2Apr 7, 2009
Ribs for line collapse prevention in damascene structures
INFINEON TECHNOLOGIES AG0 citations41
MAROKKEY SAJAN
4 patentsUS8450122B2May 28, 2013
Test structures and methods
MAROKKEY SAJAN7 citations82
US8203223B2Jun 19, 2012
Overlay target for polarized light lithography
MAROKKEY SAJAN3 citations61
US8183129B2May 22, 2012
Alignment marks for polarized light lithography and method for use thereof
MAROKKEY SAJAN2 citations61
US8330937B2Dec 11, 2012
Stray light feedback for dose control in semiconductor lithography systems
MAROKKEY SAJAN1 citations51