Inventor

FUJII SHUITSU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “FUJII SHUITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADTEC CORP LIMITED

2 patents

US5936481AAug 10, 1999

System for impedance matching and power control for apparatus for high frequency plasma treatment

ADTEC CORP LIMITED126 citations94

US6080271AJun 27, 2000

Plasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable core

ADTEC CORP LIMITED81 citations92

MAX PLANCK GESELLSCHAFT

1 patent

US7683342B2Mar 23, 2010

Plasma source

MAX PLANCK GESELLSCHAFT47 citations91

HITACHI INT ELECTRIC INC

1 patent

US7514377B2Apr 7, 2009

Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device

HITACHI INT ELECTRIC INC27 citations89

ADTEC PLASMA TECHNOLOGY CO LTD

1 patent

US7858899B2Dec 28, 2010

Coaxial microwave plasma torch

ADTEC PLASMA TECHNOLOGY CO LTD12 citations73

ADTEC PLASMA TECH CO LTD

1 patent

US9526160B2Dec 20, 2016

Cavity resonator of microwave plasma generating apparatus

ADTEC PLASMA TECH CO LTD0 citations27